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Image Search Results
Journal: Micromachines
Article Title: Low Power Compact 3D-Constructed AlScN Piezoelectric MEMS Mirrors for Various Scanning Strategies
doi: 10.3390/mi14091789
Figure Lengend Snippet: Finite element analysis results of ( a ) horizontal and ( b ) diagonal movement under ±20 V applied voltage on the piezo actuators.
Article Snippet: presents the moving mechanism of the designed quasi-static MEMS mirror and
Techniques: